TY  - BOOK
AU  - Stempkovskij, A. L.
ED  - "Problems of advanced micro- and nanoelectronic systems development - 2018", All-Russia science and technology conference
TI  - Problems of advanced micro-and nanoelectronic systems development - 2018
SN  - 9785946271851
PY  - 2019///
CY  - Москва
PB  - Federal state budget science institute for design problems in microelectronics of Russian academy of sciences, Манускрипт
KW  - Микроэлектроника
KW  - Съезды, совещания и т.п
KW  - RU\NLR\AUTH\661267605
KW  - Наноэлектроника
KW  - RU\NLR\AUTH\661468617
KW  - З844.1я431(2)
N2  - Библиогр. в конце ст; Указ. в конце томов
ER  -