<?xml version="1.0" encoding="UTF-8"?>
<record
    xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
    xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"
    xmlns="http://www.loc.gov/MARC21/slim">

  <leader>02132nam2a2200313   4500</leader>
  <controlfield tag="001">RU\NLR\BIBL_A\012124666</controlfield>
  <controlfield tag="005">20191029165410.0</controlfield>
  <datafield tag="010" ind1=" " ind2=" ">
    <subfield code="a">978-5-94627-192-9</subfield>
    <subfield code="9">100</subfield>
  </datafield>
  <datafield tag="021" ind1=" " ind2=" ">
    <subfield code="a">RU</subfield>
    <subfield code="b">&#x41A;&#x41D;-&#x41F;-19-069918</subfield>
    <subfield code="9">&#x41A;&#x41D;-&#x41F;-19-5042</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(NLR Aleph) 012124666</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
    <subfield code="a">(RuMoRGB)010096200</subfield>
  </datafield>
  <datafield tag="090" ind1=" " ind2=" ">
    <subfield code="a">12012098</subfield>
    <subfield code="c">12012098</subfield>
  </datafield>
  <datafield tag="100" ind1=" " ind2=" ">
    <subfield code="a">20191021d2019    k  y0rusy50      ca</subfield>
  </datafield>
  <datafield tag="101" ind1="0" ind2=" ">
    <subfield code="a">eng</subfield>
    <subfield code="a">rus</subfield>
  </datafield>
  <datafield tag="102" ind1=" " ind2=" ">
    <subfield code="a">RU</subfield>
  </datafield>
  <datafield tag="105" ind1=" " ind2=" ">
    <subfield code="a">a   z   000zy</subfield>
  </datafield>
  <datafield tag="200" ind1="0" ind2=" ">
    <subfield code="a">Iss. 4</subfield>
  </datafield>
  <datafield tag="210" ind1=" " ind2=" ">
    <subfield code="d">2019</subfield>
  </datafield>
  <datafield tag="215" ind1=" " ind2=" ">
    <subfield code="a">VI, 45 &#x441;.</subfield>
    <subfield code="c">&#x438;&#x43B;., &#x446;&#x432;. &#x438;&#x43B;.</subfield>
  </datafield>
  <datafield tag="313" ind1=" " ind2=" ">
    <subfield code="a">&#x421;&#x435;&#x43A;&#x446;&#x438;&#x44F; 9. &#x41F;&#x440;&#x43E;&#x435;&#x43A;&#x442;&#x438;&#x440;&#x43E;&#x432;&#x430;&#x43D;&#x438;&#x435; &#x44D;&#x43B;&#x435;&#x43A;&#x442;&#x440;&#x43E;&#x43D;&#x43D;&#x43E;&#x439; &#x43A;&#x43E;&#x43C;&#x43F;&#x43E;&#x43D;&#x435;&#x43D;&#x442;&#x43D;&#x43E;&#x439; &#x431;&#x430;&#x437;&#x44B;. &#x421;&#x435;&#x43A;&#x446;&#x438;&#x44F; 10. &#x41F;&#x440;&#x43E;&#x435;&#x43A;&#x442;&#x438;&#x440;&#x43E;&#x432;&#x430;&#x43D;&#x438;&#x435; &#x440;&#x430;&#x434;&#x438;&#x430;&#x446;&#x438;&#x43E;&#x43D;&#x43D;&#x43E;-&#x441;&#x442;&#x43E;&#x439;&#x43A;&#x438;&#x445; &#x421;&#x411;&#x418;&#x421; &#x438; &#x44D;&#x43B;&#x435;&#x43C;&#x435;&#x43D;&#x442;&#x43E;&#x432; &#x434;&#x43B;&#x44F; &#x43A;&#x43E;&#x441;&#x43C;&#x438;&#x447;&#x435;&#x441;&#x43A;&#x43E;&#x439; &#x442;&#x435;&#x445;&#x43D;&#x438;&#x43A;&#x438;. &#x421;&#x435;&#x43A;&#x446;&#x438;&#x44F; 11. &#x420;&#x435;&#x448;&#x435;&#x43D;&#x438;&#x435; &#x441;&#x435;&#x442;&#x435;&#x432;&#x44B;&#x445; &#x438; &#x430;&#x43B;&#x433;&#x43E;&#x440;&#x438;&#x442;&#x43C;&#x438;&#x447;&#x435;&#x441;&#x43A;&#x438;&#x445; &#x437;&#x430;&#x434;&#x430;&#x447;</subfield>
  </datafield>
  <datafield tag="461" ind1=" " ind2="0">
    <subfield code="1">001RU\NLR\BIBL_A\012124620</subfield>
    <subfield code="1">2001#$aProblems of advanced micro-and nanoelectronic systems development - 2018$eVIII All-Russia science &amp; technology conference$eselected articles$f[chief editor: Alexander L. Stempkovsky, academician of RAS, Doctor of science, Professor]$vIss. 4</subfield>
    <subfield code="9">12011861</subfield>
    <subfield code="c">&#x41C;&#x43E;&#x441;&#x43A;&#x432;&#x430;</subfield>
    <subfield code="d">2019</subfield>
    <subfield code="f">[chief editor: Alexander L. Stempkovsky, academician of RAS, Doctor of science, Professor]</subfield>
    <subfield code="n">Federal state budget science institute for design problems in microelectronics of Russian academy of sciences</subfield>
    <subfield code="o">VIII All-Russia science &amp; technology conference : selected articles</subfield>
    <subfield code="t">Problems of advanced micro-and nanoelectronic systems development - 2018</subfield>
    <subfield code="y">9785946271851</subfield>
    <subfield code="v">Iss. 4</subfield>
  </datafield>
  <datafield tag="606" ind1="1" ind2=" ">
    <subfield code="a">&#x411;&#x43E;&#x43B;&#x44C;&#x448;&#x438;&#x435; &#x438;&#x43D;&#x442;&#x435;&#x433;&#x440;&#x430;&#x43B;&#x44C;&#x43D;&#x44B;&#x435; &#x441;&#x445;&#x435;&#x43C;&#x44B;</subfield>
    <subfield code="j">&#x421;&#x44A;&#x435;&#x437;&#x434;&#x44B;, &#x441;&#x43E;&#x432;&#x435;&#x449;&#x430;&#x43D;&#x438;&#x44F; &#x438; &#x442;.&#x43F;</subfield>
    <subfield code="x">&#x41F;&#x440;&#x43E;&#x435;&#x43A;&#x442;&#x438;&#x440;&#x43E;&#x432;&#x430;&#x43D;&#x438;&#x435;</subfield>
    <subfield code="9">2299501</subfield>
    <subfield code="3">RU\NLR\AUTH\661376777</subfield>
  </datafield>
  <datafield tag="606" ind1="1" ind2=" ">
    <subfield code="a">&#x411;&#x43E;&#x43B;&#x44C;&#x448;&#x438;&#x435; &#x438;&#x43D;&#x442;&#x435;&#x433;&#x440;&#x430;&#x43B;&#x44C;&#x43D;&#x44B;&#x435; &#x441;&#x445;&#x435;&#x43C;&#x44B;</subfield>
    <subfield code="j">&#x421;&#x44A;&#x435;&#x437;&#x434;&#x44B;, &#x441;&#x43E;&#x432;&#x435;&#x449;&#x430;&#x43D;&#x438;&#x44F; &#x438; &#x442;.&#x43F;</subfield>
    <subfield code="x">&#x420;&#x430;&#x434;&#x438;&#x430;&#x446;&#x438;&#x43E;&#x43D;&#x43D;&#x430;&#x44F; &#x441;&#x442;&#x43E;&#x439;&#x43A;&#x43E;&#x441;&#x442;&#x44C;</subfield>
    <subfield code="9">2211905</subfield>
    <subfield code="3">RU\NLR\AUTH\6601562525</subfield>
  </datafield>
  <datafield tag="686" ind1="1" ind2=" ">
    <subfield code="a">&#x417;844.15-02&#x44F;431(2)</subfield>
  </datafield>
  <datafield tag="686" ind1="1" ind2=" ">
    <subfield code="a">&#x417;844.15-019.8&#x44F;431(2)</subfield>
  </datafield>
  <datafield tag="942" ind1=" " ind2=" ">
    <subfield code="c">BOOK</subfield>
  </datafield>
  <datafield tag="980" ind1=" " ind2=" ">
    <subfield code="a">NB</subfield>
  </datafield>
  <datafield tag="995" ind1=" " ind2=" ">
    <subfield code="5">2019-10-21</subfield>
    <subfield code="a">ad</subfield>
    <subfield code="b">NLR01</subfield>
    <subfield code="c">NLR01</subfield>
    <subfield code="e">IF</subfield>
    <subfield code="f">1-2904926</subfield>
    <subfield code="k">&#x418;&#x43A; 2019-8/195</subfield>
    <subfield code="o">0</subfield>
    <subfield code="r">BOOK</subfield>
    <subfield code="s">_20198195</subfield>
  </datafield>
</record>
