TY  - BOOK
AU  - Stepanov, A. E.
AU  - Suetin, N. V.
AU  - Rerich, V. K.
TI  - Numerical study of radiation of plasma composed of different elements in application to development of EUV light source for lithography
T2  - Препринт ТРИНИТИ
VL  - 102-A
PY  - 2003///
CY  - [М.]
PB  - ЦНИИатоминформ
KW  - Литография
KW  - RU\NLR\AUTH\66123822
KW  - М831
N2  - Библиогр.: с. 15-16 (19 назв.)
ER  -