TY  - BOOK
ED  - International workshop on "Micro process engineering and nanotechnology applications"
ED  - "GEO-Siberia-2010", international exhibition and scientific congress
TI  - International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation
PY  - 2010///
CY  - Novosibirsk
PB  - SSGA
KW  - Микроэлектроника
KW  - Съезды, совещания и т.п
KW  - RU\NLR\AUTH\661267605
KW  - Нанотехнологии
KW  - RU\NLR\AUTH\66830353
KW  - З844.1я431(0)
KW  - Ж6я431(0)
N2  - Библиогр. в конце докл
ER  -