International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation, proceedings
Ик 2010-3/782 английский/International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation : proceedings / The Six Intern. exhibition a. sci. congr. "Geo-Siberia - 2010", 27-29 April 2010, Novosibirsk, Russian Federation [etc.].International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation : proceedings / The Six Intern. exhibition a. sci. congr. "Geo-Siberia - 2010", 27-29 April 2010, Novosibirsk, Russian Federation [etc.].International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation : proceedings.Novosibirsk/SSGA/, 2010 ( ). - SSGA, 2010. - 149 с. : ил., портр. ; 20 см.International workshop on "Micro process engineering and nanotechnology applications", 27-28 April 2010, Novosibirsk, Russian Federation : proceedings. Novosibirsk, 2010 .
В надзаг. также: Inst. for micro process engineering (IMVT), Karlsruhe inst. of technology , Germany, Kutateladze inst. of thermophysics SB RAS, Russ. Federation, Siberian state acad. of geodesy (SSGA). - Библиогр. в конце докл. Библиогр. в конце докл.Микроэлектроника -- Съезды, совещания и т.п./Нанотехнологии -- Съезды, совещания и т.п./З844.1я431(0)/Ж6я431(0)/ International workshop on "Micro process engineering and nanotechnology applications" ( 2010; Novosibirsk ). "GEO-Siberia-2010", international exhibition and scientific congress (; Novosibirsk)/
В надзаг. также: Inst. for micro process engineering (IMVT), Karlsruhe inst. of technology , Germany, Kutateladze inst. of thermophysics SB RAS, Russ. Federation, Siberian state acad. of geodesy (SSGA). - Библиогр. в конце докл. Библиогр. в конце докл.Микроэлектроника -- Съезды, совещания и т.п./Нанотехнологии -- Съезды, совещания и т.п./З844.1я431(0)/Ж6я431(0)/ International workshop on "Micro process engineering and nanotechnology applications" ( 2010; Novosibirsk ). "GEO-Siberia-2010", international exhibition and scientific congress (; Novosibirsk)/